A User's Guide to Vacuum Technology by John F. O'Hanlon pdf epub fb2
Author: John F. O'HanlonTitle: A User's Guide to Vacuum Technology
ISBN: 0471812420
ISBN13: 978-0471812425
Other Formats: mobi mbr lit docx
Pages: 512 pages
Publisher: Wiley-Interscience; 2 edition (April 24, 1989)
Language: English
Category: Engineering & Transportation
Size PDF version: 1722 kb
Size EPUB version: 1627 kb
Subcategory: Engineering
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An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.