Plasma & Process-Induced Damage, 2001: 6th International Symposium (IEEE Conference Proceedings) pdf epub fb2

Plasma & Process-Induced Damage, 2001: 6th International Symposium (IEEE Conference Proceedings) by Calif.)) International Symposium on Plasma Process-Induced Damage (6th : 2001 : Monterey pdf epub fb2

Plasma & Process-Induced Damage, 2001: 6th International Symposium (IEEE Conference Proceedings) Author: Calif.)) International Symposium on Plasma Process-Induced Damage (6th : 2001 : Monterey
Title: Plasma & Process-Induced Damage, 2001: 6th International Symposium (IEEE Conference Proceedings)
ISBN: 096515775X
ISBN13: 978-0965157759
Other Formats: lrf rtf docx mobi
Pages: 138 pages
Publisher: IEEE (October 1, 2001)
Language: English
Category: Engineering & Transportation
Size PDF version: 1480 kb
Size EPUB version: 1515 kb
Subcategory: Engineering




This work covers topics such as: damage measurement; plasma characterization and damage mitigation; non-volatile memories; ultra-thin dielectrics; contamination; and multi-terminal effects.